Frontier Research Institute for Interdisciplinary Sciences
Tohoku University

Recently, the nano-composite films have attracted much attention with many useful properties. These nano-composite films are made up of ceramic matrix and magnetic metal nano-particles. The coupling of properties between matrix and metal nano-particles can lead to many novel properties, such as high-frequency soft magnetic properties, tunnel magnetoresistance, multi-ferroic function, magneto-optical properties and so on.

Almond of them, the interest in the soft magnetic nano-composite films has grown to realize Electromagnetic Compatibility (EMC) Suppressor for down-sized microelectronic devices at GHz frequency, owing to their advantage of high saturation magnetization and permeability. We succeed to make the Co-TiN nano-composite films with good GH soft-magnetic property and noise suppress damping effect. On the other hand, the recent finding of various types of giant magnetoresistance GMR materials has led to significant advances in technology. In particular, these GMR materials can be used in magnetic sensors, such as biosensor in medical diagnostics, read heads in high density magnetic storage. However, the commercial using GMR devices have too complex multilayer structure. The nano-composite films have simple structure and can be produced with low cost. We will challenge the GMR materials with CoPd, CoPt, FePt alloy particles and TiO2, Carbon matrix structure. CVD-sputtering, Multi-targets sputtering process will be introduced to control the composition structure of these complex materials.